3M™ Betapure™ AUL Series Filter Cartridge
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Details
Highlights
- Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
- Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
- The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration
3M™ Betapure™ AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.
Specifications
Legal disclaimer
Picture shown is representative of the product family. Actual product may differ from the picture including end modification, presence or absence of gaskets, number or cells, length, number of rounds of housing, inlet/outlet type of housing, filter configuration,appearance etc . Actual product will be as per part number or model number and associated specifications in catalog.
