1. India
  2. All 3M Products
  3. Electronics Materials & Components
  4. CMP Materials
  5. CMP Pad Conditioners
  6. 3M™ CMP Pad Conditioner Brush PB32A-1, 4.25-in dia

3M™ CMP Pad Conditioner Brush PB32A-1, 4.25-in dia

3M ID 60020020792
  • Exclusive polymer substrate enhances corrosion resistance
  • Durable brush bristles assist with removal of pad debris from porometric and felt-based pads
  • Easy connection to polishing tool end effector
 More
View all details
Details

Engineered CMP pad brushes are designed for critical semiconductor buff CMP applications.

  • Exclusive polymer substrate enhances corrosion resistance
  • Durable brush bristles assist with removal of pad debris from porometric and felt-based pads
  • Easy connection to polishing tool end effector
Specifications
Abrasive Working Surface
Full Face
Applications
CMP
Brand
3M™
Bristle Diameter
0.005 in
Brush Material-Density
Nylon, >2000/sq in
Carrier Colour
Black
Carrier Format
Disk
Carrier Material
Polycarbonate
Carrier Size
4.25 inch diameter
Carrier Substrate
Polycarbonate
CMP Process
Cu (barrier), Final Buff, W (buff)
Manufacturing Location
United States
Mineral Type
Nylon Fibers
Product Series
PB32A
Product Type
Pad Conditioner Brush