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  6. 3M™ Diamond Pad Conditioner Ring E3921, 360 mm Diameter

3M™ Diamond Pad Conditioner Ring E3921, 360 mm Diameter

3M ID 60020020917
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for superior retention
  • Controlled diamond placement and protrusion for consistent and reliable performance through disc life
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Details

Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for superior diamond retention, with controlled diamond placement and protrusion.

  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for superior retention
  • Controlled diamond placement and protrusion for consistent and reliable performance through disc life
Specifications
Abrasive Working Surface
Segmented
Applications
CMP
CMP Process
Cu (Bulk), PMD/ILD, W (Bulk)
Manufacturing Location
United States
Mineral Type
Nickel-based Alloy with Patterned Diamond
Product Series
E3921