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  6. 3M™ Trizact™ Pad Conditioner, B5-M990-5S2, 4.25-in dia

3M™ Trizact™ Pad Conditioner, B5-M990-5S2, 4.25-in dia

3M ID 60020021394
  • 3D microreplicated structures help manufacturers deliver precision and control for unique requirements
  • Diamond coated ceramic material can be manufactured to key specifications for maximum yield and pad life
  • Metal-free composition is ideal advanced node processes sensitive to contamination
  • Outstanding disk-to-disk consistency for predictive performance
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Details

3M™ Trizact™ Pad Conditioners deliver precision, consistency and reliability to semiconductor chemical mechanical polishing (CMP). Diamond-coated ceramic construction is ideal for manufacturing to micro-scale specifications, as well as exceptionally smooth pad surface finishes without tiny scratches commonly caused by diamond grit abrasives.

  • 3D microreplicated structures help manufacturers deliver precision and control for unique requirements
  • Diamond coated ceramic material can be manufactured to key specifications for maximum yield and pad life
  • Metal-free composition is ideal advanced node processes sensitive to contamination
  • Outstanding disk-to-disk consistency for predictive performance
Specifications
Abrasive Working Surface
B5-M990 Pattern
Applications
CMP
Brand
Trizact™
Carrier Material
Stainless Steel
Mineral Type
CVD coated ceramic
Product Series
B5-M990
Product Type
Diamond Pad Conditioner