3M™ Trizact™ Pad Conditioner, B5-M990-5S2, 4.25-in dia
- 3M ID 60020021394
Specifications
Details
Highlights
- 3D microreplicated structures help manufacturers deliver precision and control for unique requirements
- Diamond coated ceramic material can be manufactured to key specifications for maximum yield and pad life
- Metal-free composition is ideal advanced node processes sensitive to contamination
- Outstanding disk-to-disk consistency for predictive performance
3M™ Trizact™ Pad Conditioners deliver precision, consistency and reliability to semiconductor chemical mechanical polishing (CMP). Diamond-coated ceramic construction is ideal for manufacturing to micro-scale specifications, as well as exceptionally smooth pad surface finishes without tiny scratches commonly caused by diamond grit abrasives.
