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  6. 3M™ Diamond Pad Conditioner A181, 4.25 in diameter

3M™ Diamond Pad Conditioner A181, 4.25 in diameter

3M ID 60020020545
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for superior retention
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Details

Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for superior diamond retention, with controlled diamond placement and protrusion.

  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for superior retention
Specifications
Abrasive Working Surface
Full Face
Aggressiveness
15-19
Applications
CMP
Carrier Colour
Grey
Carrier Format
Disk
Carrier Size
4.25 inch diameter
Carrier Substrate
304 SS
CMP Process
Cu (bulk), PMD/ILD, STI Process, W (bulk)
Diamond Size
251 um
Diamond Type
Type 4, semi-sharp
Manufacturing Location
United States
Mineral Type
Nickel based alloy with patterned diamond
Product Series
A181
Product Type
Diamond Pad Conditioner