1. India
  2. All 3M Products
  3. Electronics Materials & Components
  4. CMP Materials
  5. CMP Pad Conditioners
  6. 3M™ Diamond Pad Conditioner Ring E3920, 360-mm dia

3M™ Diamond Pad Conditioner Ring E3920, 360-mm dia

3M ID 60020020263
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for great retention
  • Controlled diamond placement and protrusion for consistent and reliable performance through disc life
 More
View all details
Details

Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for excellent diamond retention, with controlled diamond placement and protrusion.

  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for great retention
  • Controlled diamond placement and protrusion for consistent and reliable performance through disc life
Specifications
Abrasive Working Surface
Segmented
Aggressiveness
150-170
Applications
CMP
Brand
3M™
Carrier Colour
Grey
Carrier Format
Ring
Carrier Material
304 Stainless Steel
Carrier Size
14.17 inch diameter
Carrier Substrate
304 SS
CMP Process
Cu (bulk), PMD/ILD, W (bulk)
Diamond Size
251 um
Diamond Type
Type 8, sharp
Manufacturing Location
United States
Mineral Type
Nickel based alloy with patterned diamond
Product Series
E3920