3M™ Diamond Pad Conditioner A63, 4.25-in dia

3M ID 60020020453
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for great retention
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Details

Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for excellent diamond retention, with controlled diamond placement and protrusion.

  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for great retention
Specifications
Abrasive Working Surface
Ring Face
Aggressiveness
1-4
Applications
CMP
Brand
3M™
Carrier Colour
Grey
Carrier Format
Disk - with bevel edge
Carrier Material
304 Stainless Steel
Carrier Size
4.25 inch diameter
Carrier Substrate
304 SS
CMP Process
Cu (barrier), Cu (bulk)
Diamond Size
63 um
Diamond Type
Type 2, blocky
Manufacturing Location
United States
Mineral Type
Nickel based alloy with patterned diamond
Product Series
A63
Product Type
Diamond Pad Conditioner